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Journal description
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Details for article 2 of 36 found articles
| Title: |
Application of the ECR slot antenna plasma source for ion implantation |
| Author: |
Korzec, D. Raiko, V. Engemann, J. Günzel, R. Brutscher, J. Möller, W. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 93 (1997) nr. 2-3 pages 8 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. All rights reserved. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 36 found articles
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