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                                       Details for article 7 of 25 found articles
 
 
  Effect of deposition conditions on the characteristics of reactively sputtered titanium nitride films
 
 
Title: Effect of deposition conditions on the characteristics of reactively sputtered titanium nitride films
Author: Lou, H.Q.
Axén, N.
Somekh, R.E.
Hutchings, I.M.
Appeared in: Surface & coatings technology
Paging: Volume 90 (1997) nr. 1-2 pages 5 p.
Year: 1997
Contents:
Publisher: Elsevier Science S.A. All rights reserved
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 25 found articles
 
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