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Journal description
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Details for article 18 of 46 found articles
| Title: |
Hydrogen incorporation in dual-mode PECVD amorphous silicon oxide thin films |
| Author: |
Etemadi, R. Godet, C. Perrin, J. Bourée, J.E. Drévillon, B. Clerc, C. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 80 (1996) nr. 1-2 pages 5 p. |
| Year: |
1996 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 46 found articles
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