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  A coating thickness uniformity model for physical vapour deposition systems: overview
 
 
Title: A coating thickness uniformity model for physical vapour deposition systems: overview
Author: Fancey, K.S.
Appeared in: Surface & coatings technology
Paging: Volume 71 (1995) nr. 1 pages 14 p.
Year: 1995
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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