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Journal description
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Details for article 31 of 65 found articles
| Title: |
Material properties of ZrN film on silicon prepared by low-energy ion-assisted deposition |
| Author: |
Horita, Susumu Kobayashi, Mituru Akahori, Hiroshi Hata, Tomonobu |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 66 (1994) nr. 1-3 pages 5 p. |
| Year: |
1994 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 65 found articles
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