Influence of TiAl cathode material manufacturing route on the structural and tribo-mechanical properties of arc-evaporated TiAlN thin films
Titel:
Influence of TiAl cathode material manufacturing route on the structural and tribo-mechanical properties of arc-evaporated TiAlN thin films
Auteur:
Rümenapf, Finn Lopes Dias, Nelson Filipe Stangier, Dominic Denkmann, Nils Meijer, Alexander Jaquet, Simon Garcia Carballo, Rafael Debus, Jörg Biermann, Dirk Tillmann, Wolfgang