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                                       Details for article 27 of 56 found articles
 
 
  Influence of oxygen flow on the structure, chemical composition, and dielectric strength of AlxTayOz thin films deposited by pulsed-DC reactive magnetron sputtering
 
 
Title: Influence of oxygen flow on the structure, chemical composition, and dielectric strength of AlxTayOz thin films deposited by pulsed-DC reactive magnetron sputtering
Author: Drevet, Richard
Souček, Pavel
Mareš, Pavel
Ondračka, Pavel
Fekete, Matej
Dubau, Martin
Vašina, Petr
Appeared in: Surface & coatings technology
Paging: Volume 498 () nr. C pages p.
Year: 2025
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 27 of 56 found articles
 
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