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Integrated vertical force transfer structure for high-performance MEMS-based array piezoresistive tactile sensor |
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Title: |
Integrated vertical force transfer structure for high-performance MEMS-based array piezoresistive tactile sensor |
Author: |
Wang, Shan Gao, Yu Zhang, Minli Li, Chenyuan Yue, Chenxi Zhang, Jianhao Cheng, Jiagen Zhong, Yuxin Hu, Mengyi Liu, Zhihui Fiadosenka, Uladzimir Liu, Chaoran Dong, Linxi |
Appeared in: |
Surface & coatings technology |
Paging: |
Volume 497 () nr. C pages p. |
Year: |
2025 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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