Synthesis of AlxCoCrFeNi HEA thin films by high power impulse magnetron sputtering: Effect of substrate bias voltage
Title:
Synthesis of AlxCoCrFeNi HEA thin films by high power impulse magnetron sputtering: Effect of substrate bias voltage
Author:
Togni, Alessandro Montagner, Francesco Miorin, Enrico Mortalò, Cecilia Zin, Valentina Bolelli, Giovanni Lusvarghi, Luca Frabboni, Stefano Gazzadi, Gian Carlo Armelao, Lidia Deambrosis, Silvia Maria