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                                       Details for article 18 of 43 found articles
 
 
  Effects of growth rate and dynamic substrate tilt on properties of Au-Ta alloy films deposited by high-power impulse magnetron sputtering
 
 
Title: Effects of growth rate and dynamic substrate tilt on properties of Au-Ta alloy films deposited by high-power impulse magnetron sputtering
Author: Kim, E.
Engwall, A.M.
Merlo, J.B.
Shin, S.J.
Goodelman, D.C.
Baker, A.A.
Taylor, G.V.
Kucheyev, S.O.
Bayu Aji, L.B.
Appeared in: Surface & coatings technology
Paging: Volume 493 () nr. P2 pages p.
Year: 2024
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 18 of 43 found articles
 
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