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Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia |
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Titel: |
Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia |
Auteur: |
Ermakova, Evgeniya Shayapov, Vladimir Saraev, Andrey Maximovsky, Eugene Kirienko, Viktor Khomyakov, Maksim Sulyaeva, Veronica Kolodin, Aleksey Gerasimov, Evgeny Kosinova, Marina |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 490 () nr. C pagina's p. |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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