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  On direct-current magnetron sputtering at industrial conditions with high ionization fraction of sputtered species
 
 
Title: On direct-current magnetron sputtering at industrial conditions with high ionization fraction of sputtered species
Author: Hnilica, Jaroslav
Klein, Peter
Učík, Martin
Debnárová, Stanislava
Klusoň, Jan
Vašina, Petr
Appeared in: Surface & coatings technology
Paging: Volume 487 () nr. C pages p.
Year: 2024
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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