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                                       Details for article 6 of 51 found articles
 
 
  Characterization of cosputtered (TiZrHfY)Nx films
 
 
Title: Characterization of cosputtered (TiZrHfY)Nx films
Author: Ou, Tzu-Yu
Chang, Li-Chun
Chen, Yung-I
Yu, Chun-Sheng
Appeared in: Surface & coatings technology
Paging: Volume 483 () nr. C pages p.
Year: 2024
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 51 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands