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Journal description
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Details for article 10 of 106 found articles
| Title: |
Conformal growth of GaP on high aspect ratio Si structured surface via plasma-enhanced atomic layer deposition |
| Author: |
Uvarov, Alexander Gudovskikh, Alexander Baranov, Artem Maksimova, Alina Vyacheslavova, Ekaterina Kirilenko, Demid |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 477 () nr. C pages p. |
| Year: |
2024 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 106 found articles
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