Is it meaningful to quantify vacancy concentrations of nanolamellar (Ti,Al)N thin films based on laser-assisted atom probe data?
Titel:
Is it meaningful to quantify vacancy concentrations of nanolamellar (Ti,Al)N thin films based on laser-assisted atom probe data?
Auteur:
Hans, Marcus Tkadletz, Michael Primetzhofer, Daniel Waldl, Helene Schiester, Maximilian Bartosik, Matthias Czettl, Christoph Schalk, Nina Mitterer, Christian Schneider, Jochen M.