Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Titel:
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Auteur:
Patidar, Jyotish Sharma, Amit Zhuk, Siarhei Lorenzin, Giacomo Cancellieri, Claudia Sarott, Martin F. Trassin, Morgan Thorwarth, Kerstin Michler, Johann Siol, Sebastian