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Journal description
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Details for article 5 of 10 found articles
| Title: |
Properties and structure of silicon nitride films synthesized by ion-beam-enhanced deposition |
| Author: |
Xianghuai, Liu Yuehui, Yu Zhihong, Zheng Wei, Huang Shichang, Zou Zuqing, Jin Ming, Chang Shoulian, Xu Taniguchi, S. Shibata, T. Nakamura, K. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 46 (1991) nr. 2 pages 6 p. |
| Year: |
1991 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 10 found articles
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