Effects of substrate rotation during AlSi-HiPIMS/Ti-DCMS co-sputtering growth of TiAlSiN coatings on phase content, microstructure, and mechanical properties
Titel:
Effects of substrate rotation during AlSi-HiPIMS/Ti-DCMS co-sputtering growth of TiAlSiN coatings on phase content, microstructure, and mechanical properties
Auteur:
Hsu, Tun-Wei Greczynski, Grzegorz Christensen, Bjarke Holl Almtoft, Klaus Pagh Boyd, Robert Kolozsvári, Szilárd Polcik, Peter Bolz, Stephan Kölker, Werner Schiffers, Christoph Mesic, Biljana Odén, Magnus