|
Deviations between film and target compositions induced by backscattered Ar during sputtering from M2-Al-C (M = Cr, Zr, and Hf) composite targets |
|
|
|
Titel: |
Deviations between film and target compositions induced by backscattered Ar during sputtering from M2-Al-C (M = Cr, Zr, and Hf) composite targets |
Auteur: |
Chien, Yu-Ping Mráz, Stanislav Fekete, Matej Hans, Marcus Primetzhofer, Daniel Kolozsvári, Szilárd Polcik, Peter Schneider, Jochen M. |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 446 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
|
Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|