Non-reactive HiPIMS deposition of NbCx thin films: Effect of the target power density on structure-mechanical properties
Titel:
Non-reactive HiPIMS deposition of NbCx thin films: Effect of the target power density on structure-mechanical properties
Auteur:
Bahr, A. Glechner, T. Wojcik, T. Kirnbauer, A. Sauer, M. Foelske, A. Hunold, O. Ramm, J. Kolozsvári, S. Ntemou, E. Pitthan, E. Primetzhofer, D. Riedl, H. Hahn, R.