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Journal description
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Details for article 20 of 29 found articles
| Title: |
Low-pressure CVD of (Tix,W1-x)Ny from WF6, TiCl4 and NH3 |
| Author: |
Hulkko, Johan G. Qiu, Ren Bäcke, Olof Forslund, Axel Halvarsson, Mats Larsson, Henrik Boman, Mats |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 438 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 20 of 29 found articles
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