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Growth and characterization of Si-doped Ga2O3 thin films by remote plasma atomic layer deposition: Toward UVC-LED application |
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Titel: |
Growth and characterization of Si-doped Ga2O3 thin films by remote plasma atomic layer deposition: Toward UVC-LED application |
Auteur: |
Zhang, Xiao-Ying Yang, Yue Fan, Wei-Hang Wang, Chen Wu, Wan-Yu Tseng, Ming-Chun Wuu, Dong-Sing Gao, Peng Kuo, Hao-Chung Lien, Shui-Yang Zhu, Wen-Zhang |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 435 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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