Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering
Titel:
Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering
Auteur:
Moskovkin, P. Maszl, C. Schierholz, R. Breilmann, W. Petersen, J. Pflug, A. Muller, J. Raza, M. Konstantinidis, S. von Keudell, A. Lucas, S.