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Journal description
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Details for article 3 of 26 found articles
| Title: |
Bipolar HiPIMS: The role of capacitive coupling in achieving ion bombardment during growth of dielectric thin films |
| Author: |
Du, Hao Zanáška, Michal Brenning, Nils Helmersson, Ulf |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 416 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
The Author(s) |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 26 found articles
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