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Improving phase stability, hardness, and oxidation resistance of reactively magnetron sputtered (Al,Cr,Nb,Ta,Ti)N thin films by Si-alloying |
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Titel: |
Improving phase stability, hardness, and oxidation resistance of reactively magnetron sputtered (Al,Cr,Nb,Ta,Ti)N thin films by Si-alloying |
Auteur: |
Kretschmer, Andreas Kirnbauer, Alexander Moraes, Vincent Primetzhofer, Daniel Yalamanchili, Kumar Rudigier, Helmut Mayrhofer, Paul Heinz |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 416 () nr. C pagina's p. |
Jaar: |
2021 |
Inhoud: |
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Uitgever: |
The Author(s) |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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