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Journal description
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Details for article 19 of 20 found articles
| Title: |
Toward energy-efficient physical vapor deposition: Routes for replacing substrate heating during magnetron sputter deposition by employing metal ion irradiation |
| Author: |
Li, X. Bakhit, B. Jõesaar, M.P. Johansson Hultman, L. Petrov, I. Greczynski, G. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 415 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
The Author(s) |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 20 found articles
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