Optical, electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation
Titel:
Optical, electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation
Auteur:
Valour, Arnaud Higuita, Maria Alejandra Usuga Guillonneau, Gaylord Crespo-Monteiro, Nicolas Jamon, Damien Hochedel, Marion Michalon, Jean-Yves Reynaud, Stéphanie Vocanson, Francis Jiménez, Carmen Langlet, Michel Donnet, Christophe Jourlin, Yves