Orthorhombic Ta3-xN5-yOy thin films grown by unbalanced magnetron sputtering: The role of oxygen on structure, composition, and optical properties
Titel:
Orthorhombic Ta3-xN5-yOy thin films grown by unbalanced magnetron sputtering: The role of oxygen on structure, composition, and optical properties
Auteur:
Chang, Jui-Che Eriksson, Fredrik Sortica, Mauricio A. Greczynski, Grzegorz Bakhit, Babak Hu, Zhangjun Primetzhofer, Daniel Hultman, Lars Birch, Jens Hsiao, Ching-Lien