Effect of nitrogen content on microstructure and corrosion resistance of sputter-deposited multicomponent (TiNbZrTa)Nx films
Titel:
Effect of nitrogen content on microstructure and corrosion resistance of sputter-deposited multicomponent (TiNbZrTa)Nx films
Auteur:
Shu, Rui Paschalidou, Eirini-Maria Rao, Smita G. Bakhit, Babak Boyd, Robert Moro, Marcos Vinicius Primetzhofer, Daniel Greczynski, Grzegorz Nyholm, Leif le Febvrier, Arnaud Eklund, Per