Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
Titel:
Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
Auteur:
Xu, Liangge He, Lili Yang, Lei Zhang, Zhibo Guo, Shuai Yang, Zhenhuai Wang, Peng Geng, Fangjuan Gao, Gang Sun, Chunqiang Ralchenko, Victor Zhu, Jiaqi