|
Correlation between fracture characteristics and valence electron concentration of sputtered Hf-C-N based thin films |
|
|
|
Titel: |
Correlation between fracture characteristics and valence electron concentration of sputtered Hf-C-N based thin films |
Auteur: |
Glechner, T. Lang, S. Hahn, R. Alfreider, M. Moraes, V. Primetzhofer, D. Ramm, J. Kolozsvári, S. Kiener, D. Riedl, H. |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 399 () nr. C pagina's p. |
Jaar: |
2020 |
Inhoud: |
|
Uitgever: |
The Authors |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|