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                                       Details for article 69 of 74 found articles
 
 
  Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
 
 
Title: Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
Author: Elo, Robin
Jacobson, Staffan
Kubart, Tomas
Appeared in: Surface & coatings technology
Paging: Volume 397 () nr. C pages p.
Year: 2020
Contents:
Publisher: The Authors
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 69 of 74 found articles
 
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