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Molecular dynamics study of damage nearby silicon surface bombarded by energetic carbon ions |
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Titel: |
Molecular dynamics study of damage nearby silicon surface bombarded by energetic carbon ions |
Auteur: |
Liang, Guoying Zhong, Haowen Zhang, Shijian Xu, Mofei Kuang, Shicheng Ren, Jianhui Zhang, Nan Yan, Sha Yu, Xiao Remnev, Gennady Efimovich Le, Xiaoyun |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 385 () nr. C pagina's p. |
Jaar: |
2020 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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