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Journal description
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Details for article 2 of 17 found articles
| Title: |
DSMC – Simulation of the influence of hydrogen addition on the properties of silicon deposited by HWCVD |
| Author: |
King, Hunter Pflug, Andreas Ortner, Kai Höfer, Markus Harig, Tino Sittinger, Volker |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 379 (2019) nr. C pages p. |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 17 found articles
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