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Deposition and characterization of (Ti, Al)N coatings deposited by thermal LPCVD in an industrial reactor |
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Titel: |
Deposition and characterization of (Ti, Al)N coatings deposited by thermal LPCVD in an industrial reactor |
Auteur: |
Uny, Florent Achache, Sofiane Lamri, Salim Ghanbaja, Jaafar Fischer, Evelyne Pons, Michel Blanquet, Elisabeth Schuster, Frederic Sanchette, Frederic |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 358 () nr. C pagina's 923-933 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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