Ti1−xAlxN coatings by Reactive High Power Impulse Magnetron Sputtering: film/substrate interface effect on residual stress and high temperature oxidation
Titel:
Ti1−xAlxN coatings by Reactive High Power Impulse Magnetron Sputtering: film/substrate interface effect on residual stress and high temperature oxidation
Auteur:
Deambrosis, S.M. Montagner, F. Zin, V. Fabrizio, M. Badini, C. Padovano, E. Sebastiani, M. Bemporad, E. Brunelli, K. Miorin, E.