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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 35 of 122 found articles
| Title: |
Electrical and reliability characteristics of dielectric stack with low dielectric constant SiCOH and capping SiCNH films |
| Author: |
Cheng, Yi-Lung Lee, Chih-Yen Hung, Wei-Jie Chen, Giin-Shan Fang, Jan-Shiung |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 350 () nr. C pages 57-63 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 35 of 122 found articles
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