Properties of CrN thin films deposited in plasma-activated ABS by reactive magnetron sputtering
Titel:
Properties of CrN thin films deposited in plasma-activated ABS by reactive magnetron sputtering
Auteur:
Pedrosa, Paulo Rodrigues, Marco S. Neto, Miguel A. Oliveira, Filipe J. Silva, Rui F. Borges, Joel Amaral, Margarida Ferreira, António Godinho, Luís H. Carvalho, Sandra Vaz, Filipe