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Journal description
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Details for article 19 of 19 found articles
| Title: |
Tunable ion flux density and its impact on AlN thin films deposited in a confocal DC magnetron sputtering system |
| Author: |
Trant, M. Fischer, M. Thorwarth, K. Gauter, S. Patscheider, J. Hug, H.J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 348 (2018) nr. C pages 159-167 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 19 found articles
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