|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 10 of 22 found articles
| Title: |
Integrated ECR-PECVD and magnetron sputtering system for rare-earth-doped Si-based materials |
| Author: |
Miller, J.W. Khatami, Z. Wojcik, J. Bradley, J.D.B. Mascher, P. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 336 (2018) nr. C pages 99-105 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 22 found articles
| << previous | next >> |