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Journal description
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Details for article 68 of 74 found articles
| Title: |
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films |
| Author: |
Wang, Yunfei Ricard, Andre Sarrette, Jean-Philippe Kim, Ansoon Kim, Yu Kwon |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 324 (2017) nr. C pages 243-248 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 68 of 74 found articles
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