Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target
Titel:
Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target
Auteur:
Bleykher, G.A. Borduleva, A.O. Yuryeva, A.V. Krivobokov, V.P. Lančok, J. Bulíř, J. Drahokoupil, J. Klimša, L. Kopeček, J. Fekete, L. Čtvrtlìk, R. Tomaštik, J.