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Glancing angle deposition of SiO2 thin films using a novel collimated magnetron sputtering technique |
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Title: |
Glancing angle deposition of SiO2 thin films using a novel collimated magnetron sputtering technique |
Author: |
Maidul Haque, S. Divakar Rao, K. Tripathi, S. De, Rajnarayan Shinde, D.D. Misal, J.S. Prathap, C. Kumar, Mohit Som, T. Deshpande, U. Sahoo, N.K. |
Appeared in: |
Surface & coatings technology |
Paging: |
Volume 319 (2017) nr. C pages 61-69 |
Year: |
2017 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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