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Effects of magnetic field strength and deposition pressure on the properties of TiN films produced by high power pulsed magnetron sputtering (HPPMS) |
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Titel: |
Effects of magnetic field strength and deposition pressure on the properties of TiN films produced by high power pulsed magnetron sputtering (HPPMS) |
Auteur: |
Wu, Jian Wu, B.H. Ma, D.L. Xie, D. Wu, Y.P. Chen, C.Z Li, Y.T. Sun, H. Huang, N. Leng, Y.X. |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 315 (2017) nr. C pagina's 258-267 |
Jaar: |
2017 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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