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Journal description
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Details for article 9 of 27 found articles
| Title: |
Hollow-cathode activated PECVD for the high-rate deposition of permeation barrier films |
| Author: |
Top, Michiel Schönfeld, Steffen Fahlteich, John Bunk, Sebastian Kühnel, Thomas Straach, Steffen De Hosson, Jeff T. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 314 () nr. C pages 155-159 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 27 found articles
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