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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 11 of 55 found articles
| Title: |
Effect of H2/He plasma treatment on porous low dielectric constant materials |
| Author: |
Cheng, Yi-Lung Haung, Chiao-Wei Hung, Wei-Jie Sun, Chung-Ren Lee, Wen-Hsi |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 308 (2016) nr. C pages 182-188 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 55 found articles
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