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Journal description
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Details for article 15 of 22 found articles
| Title: |
Influence of sputtering atmosphere on crystal quality and electrical properties of zirconium aluminum nitride thin film |
| Author: |
Ke, Genshui Tao, Yuan He, Zhenni Guo, Haibo Chen, Yigang DiBattista, Jim Chan, Eason Yang, Yimou |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 290 (2016) nr. C pages 7 p. |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 22 found articles
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