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  Applying “the upgraded Berg model” to predict hysteresis free reactive sputtering
 
 
Title: Applying “the upgraded Berg model” to predict hysteresis free reactive sputtering
Author: Särhammar, E.
Nyberg, T.
Berg, S.
Appeared in: Surface & coatings technology
Paging: Volume 279 () nr. C pages 39-43
Year: 2015
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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