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Journal description
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Details for article 5 of 40 found articles
| Title: |
Effect of duty cycles on the deposition and characteristics of high power impulse magnetron sputtering deposited TiN thin films |
| Author: |
Chang, Chi-Lung Shih, Siao-Gu Chen, Pin-Hung Chen, Wei-Chih Ho, Chun-Ta Wu, Wan-Yu |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 259 (2014) nr. PB pages 6 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 40 found articles
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