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Journal description
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Details for article 16 of 29 found articles
| Title: |
Model based investigation of Ar+ ion damage in DC magnetron sputtering |
| Author: |
Siemers, Michael Pflug, Andreas Melzig, Thomas Gehrke, Kai Weimar, Andreas Szyszka, Bernd |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 241 (2014) nr. C pages 4 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 29 found articles
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